Lumped-parameter model of dual–drive gantry stages

Model description: 

The lumped-parameter model in the attached images can be described using eleven physical parameters.

  1. Four masses $m_b,m_k,m_1$ and $m_2$ corresponding to the mass of the beam, the moving head and actuators $X_1$ and $X_2$.
  2. Five friction coefficients $C_{g1}, C_{g2}, C_y, C_{b1}$ and $C_{b2}$, corresponding to the viscous friction coefficients of $X_1, X_2$, and $Y$ actuators, and to the damping coefficients of the flexible joints.
  3. Two stiffness coefficients $k_{b1}$ and $k_{b2}$ of the flexible joints of the beam to actuator junctions.

The beam and the head have lengths $L_b$ and $L_h$. The head's position is measured from the center of mass of the beam and is denoted by $Y$ and $d$, In the attached image, $X$ denotes the linear position of the center of mass of the beam and $\Theta$ is the yaw angle of the beam. They are defined as

$\begin{bmatrix} X \\ \Theta \\ Y \end{bmatrix} = \begin{bmatrix} 1/2 &1/2 & 0 \\ 1/L_{b} & -1/L_{b} & 0 \\ 0 & 0 &1 \end{bmatrix}\begin{bmatrix} X_1 \\ X_2 \\ Y \end{bmatrix}$

The Lagrange-Euler formalism is applied to derive the motion equations of the system.

$$M\ddot{q}+H\dot{q}+C\dot{q}+Kq=F,$$

where $M, C$ and $K$ are the inertia, viscous damping and stiffness matrices, $H$is the coriolis and centripetal acceleration matrix, $F$ is the vector of forces and $q$ is the vector of coordinates composed of $X, \Theta$ and $Y$ (8).

$\begin{align*} M &=\begin{bmatrix} M_{11} & M_{12} & m_{h}\sin(\Theta) \\ M_{12} & J_{t}+m_{h}Y^{2} &-m_{h}d \\ m_{h}\sin(\Theta) & -m_{h}d & m_{h} \end{bmatrix}, \\ H &=\begin{bmatrix} 0 & If_{12}\dot{\Theta} & -2m_{h}\dot{\Theta} & \cos(\Theta) \\ 0 & 2m_{h}Y\dot{Y} & 0 \\ 0 & -m_{h}Y\Theta & 0 \end{bmatrix}, \\ C &= \begin{bmatrix} C_{11} & C_{12} & 0 \\ C_{12} & C_{22} & 0 \\ 0 & 0 & c_{y} \end{bmatrix},\ K=\begin{bmatrix} 0 & 0 & 0 \\ 0 & K_{22} & 0 \\ 0 & 0 & 0 \end{bmatrix}, \\ F &=[F_{c}\ M_{c}\ F_{y}]^{\mathrm T},\ q=[X \ \Theta \ Y]^{\mathrm T }. \end{align*}$

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Publication details: 

TitleDecoupling basis control of dual-drive gantry stages for path-tracking applications
Publication TypeConference Paper
Year of Publication2010
AuthorsGarciaherreros, I., Kestelyn X., Gomand J., and Barre P.-J.
Conference NameIEEE International Symposium on Industrial Electronics (ISIE), 2010.
Date Published07/2010
PublisherIEEE
Conference LocationBari
ISBN Number978-1-4244-6390-9
Accession Number11653025
Keywordselectronic equipment manufacture, feedback, feedforward, flat panel displays, industrial control, inspection, MIMO systems, motion control, synchronisation
AbstractDual-drive gantry stages are used for high-speed high-precision motion control applications such as flat panel display manufacturing and inspection. Industrially, they are usually controlled using independent axis control without taking into consideration the effect of inter-axis mechanical coupling over positioning accuracy and precision. To improve this and minimize the effect of mechanical coupling over synchronization and tracking errors, we propose to model and control the dual-drive gantry stage on a decoupling basis. This approach allows representing the highly coupled Multiple Input Multiple Output (MIMO) system as a set of independent Single Input Single Output (SISO) systems. Based on this representation, a model-based feedback-feedforward control scheme is deduced. Experimental results show that the proposed decoupling basis control scheme leads to an improved motion control of the point-tool in comparison to the present industrial control.
DOI10.1109/ISIE.2010.5637612